An in-plane thermal unimorph using confined polymers
نویسندگان
چکیده
منابع مشابه
An in-plane thermal unimorph using confined polymers
This paper presents the design, simulation and characterization of a new type of in-plane thermal unimorph, which utilizes composite SU-8/silicon microstructures. The unimorph consists of a silicon skeleton and SU-8 photoresist, which encapsulates the silicon skeleton. The silicon skeleton is asymmetric in shape, consisting of a straight segment and a meandering segment. Gaps and surrounds of t...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/17/7/s15